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An array cannot have more than 32 dimensions. See the doc of MarkArrayType(int rank)) https://docs.microsoft.com/en-us/dotnet/api/system.type.makearraytype?view=net-5.0#System_Type_MakeArrayType_System_Int32_ for details. The fix is to not create the ArrayTypeName instance when the number of dimensions exceeds 32, but instead, generate a parsing error.